Ultrasonic drilling

Hello,

I'm a technician at Princeton University, and my lab is using quartz and silicon microchips as part of our research. To make reservoirs in our chips, we currently just sand blast the hopes. However, we were hoping to upgrade to something cleaner, more accurate, and more efficient.

Ultrasonic drilling seems like a viable alternative, but I haven't been able to find much information online. We are looking to create holes around 1mm in diameter.

Do you know if it is possible to buy a simple ultrasonic drill for this purpose? If so, where? And how expensive would it be? Do you think that ultrasonic drilling would be the way to go? I also have heard that simply using a diamond drill bit on a milling machine might work just fine. Thanks for your help,

Eric